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An investigation of oxygen indiffusion during laser cleaning/annealing of silicon by means of the 16O(α, α0)16O resonance scattering

✍ Scribed by Z.L. Wang; J.F.M. Westendorp; F.W. Saris


Book ID
103580722
Publisher
Elsevier Science
Year
1983
Weight
583 KB
Volume
211
Category
Article
ISSN
0167-5087

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