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An investigation of hot carrier effects in submicron CMOS integrated circuits

✍ Scribed by Peng Fang; Rajat Rakkhit; John T. Yue


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
706 KB
Volume
33
Category
Article
ISSN
0026-2714

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It has been recently proposed that observed anomalies in the kinetic data base for the reaction of Cl with C2D6 may be explained by the formation of hot Cl atoms in the reactions C2HS+C12+C2HSCI+CI and C2D,+CI 2-\*C2D,CI + Cl. We have performed a competitive kinetic study in which the loss of C2H6 a