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An Interferometer for ‘Straightness’ Measurement

✍ Scribed by DYSON, J.

Book ID
109581392
Publisher
Nature Publishing Group
Year
1955
Tongue
English
Weight
193 KB
Volume
175
Category
Article
ISSN
0028-0836

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A laser interferometer for measuring str
A laser interferometer for measuring straightness
✍ Shyh-Tsong Lin 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 121 KB

This paper proposes a laser interferometer for determining the straightness of a moving stage. The optical setup is described and the theory is derived. The results show that this interferometer not only overcomes the disadvantages of the conventional interferometers but also provides a higher sensi