Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement

✍ Scribed by Lee, Ju-Yi ;Hsieh, Hung-Lin ;Lerondel, Gilles ;Deturche, Regis ;Lu, Mini-Pei ;Chen, Jyh-Chen

• Book ID: 115356313
• Publisher: The Optical Society
• Year: 2011
• Tongue: English
• Weight: 880 KB
• Volume: 50
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.50.001272