𝔖 Bobbio Scriptorium

✦ LIBER ✦

An improved technique for etching aluminium interconnect patterns on integrated circuits

✍ Scribed by R.E. Hines

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 44 KB
Volume: 10
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(71)90774-8

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