Deposition techniques for contacts and interconnections on integrated circuits: Published by Balzers AG, Liechtenstein, 1972; 89 pages; 120 illus.; price: SFr. 55.00.

✍ Scribed by G.S.

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 33 KB
• Volume: 17
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(73)90151-x