✦ LIBER ✦
4960489 Method for self-aligned manufacture of contacts between interconnects contained in wiring levels arranged above one another in an integrated circuit
✍ Scribed by Guenther Roeska; Josef Winnerl; Franz Neppl
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 91 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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