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An analytical model of the diffusion redistribution of ion-implanted impurity in the gate region of a MOS transistor

โœ Scribed by E. N. Bormontov; Yu. I. Bryazgunov; V. P. Lezhenin


Book ID
110133567
Publisher
SP MAIK Nauka/Interperiodica
Year
2003
Tongue
English
Weight
56 KB
Volume
29
Category
Article
ISSN
1063-7850

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