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Amorphous SiC:H- Layers from Precursors

✍ Scribed by E. Müller; A. Hilbig; R. Wenzel; K. Trommer; G. Roewer; O. Sciurova; J.R. Niklas


Book ID
101389818
Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
167 KB
Volume
4
Category
Article
ISSN
1438-1656

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