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Amorphous hydrogenated SiC from a low power discharge of SiH4-C2H2 mixture

✍ Scribed by Takeshige Ichimura; Yoshiyuki Uchida; Katsumi Yamada; Michio Ohsawa; Sueshige Ishida

Book ID: 118332421
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 179 KB
Volume: 59-60
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(83)90644-0

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