✦ LIBER ✦
Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH 4 /H 2 discharges
✍ Scribed by Strahm, B; Howling, A A; Sansonnens, L; Hollenstein, Ch
- Book ID
- 126106100
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 319 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0963-0252
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