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Amorphous carbon film deposition by PBII&D using shunting arc discharge

✍ Scribed by K. Yukimura; K. Ego; K. Takaki; S. Mukaigawa; T. Fujiwara

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 132 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.053

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