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Amorphization of crystalline Si due to heavy and light ion irradiation

✍ Scribed by Edmondson, P. D.; Riley, D. J.; Birtcher, R. C.; Donnelly, S. E.

Book ID: 120200751
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 878 KB
Volume: 106
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3195081

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