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Ablation and Amorphization of Crystalline Si by Femtosecond and Picosecond Laser Irradiation

✍ Scribed by Izawa, Yusaku; Setuhara, Yuichi; Hashida, Masaki; Fujita, Masayuki; Izawa, Yasukazu

Book ID: 125521666
Publisher: Institute of Pure and Applied Physics
Year: 2006
Tongue: English
Weight: 282 KB
Volume: 45
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.45.5791

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