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Aluminum/nickel silicide contacts on silicon

✍ Scribed by E. Hökelek; G.Y. Robinson


Book ID
107862451
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
341 KB
Volume
53
Category
Article
ISSN
0040-6090

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✍ F La Via; F Roccaforte; A Makhtari; V Raineri; P Musumeci; L Calcagno 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 436 KB

The interfacial reaction and phase formation as a function of the annealing temperature (600-10008C) and time were investigated on both titanium and nickel thin films evaporated on n-type 6H-SiC (0001) substrate. The study was carried out employing a combination of Rutherford backscattering spectrom