Aluminum contact to nickel silicide using a thin tungsten barrier

✍ Scribed by M. Bartur; M.-A. Nicolet

• Book ID: 103425754
• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 554 KB
• Volume: 91
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(82)90422-9