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AlN:Cr thin films synthesized by pulsed laser deposition: Studies by X-ray diffraction and spectroscopic ellipsometry

✍ Scribed by A. Szekeres; S. Bakalova; S. Grigorescu; A. Cziraki; G. Socol; C. Ristoscu; I.N. Mihailescu


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
309 KB
Volume
255
Category
Article
ISSN
0169-4332

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## Thin (x = 0-30 at.% ) alloy Ðlms prepared by a reactive radio frequency (r.f.) sputtering (Co 0.8 Al 0.2 ) 100-x N x method were characterized by XPS and x-ray di †raction (XRD). The Ðlm with no nitrogen consisted of a CsCltype CoAl metallic compound, while the nitrogen-containing alloys were c