Reflection high energy electron diffraction and X-ray studies of AlN films grown on Si(111) and Si(001) by organometallic chemical vapour deposition

✍ Scribed by Yoshiki Chubachi; Kiyotaka Sato; Kiyoaki Kojima

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 838 KB
• Volume: 122
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(84)90052-x