๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

All-chromium single electron transistor fabricated with plasma oxidation

โœ Scribed by T. Kubota; R. Yagi


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
128 KB
Volume
383
Category
Article
ISSN
0921-4526

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Silicon single-electron transistor fabri
โœ G. Pennelli; M. Piotto; G. Barillaro ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 285 KB

In this work, we propose a fabrication process for a single-electron transistor on silicon. The process is developed on silicon on insulator wafer and it is based on electron beam lithography and KOH anisotropic etching. A structure composed by a small silicon isle connected to the leads by channels