Silicon single-electron transistor fabri
โ
G. Pennelli; M. Piotto; G. Barillaro
๐
Article
๐
2006
๐
Elsevier Science
๐
English
โ 285 KB
In this work, we propose a fabrication process for a single-electron transistor on silicon. The process is developed on silicon on insulator wafer and it is based on electron beam lithography and KOH anisotropic etching. A structure composed by a small silicon isle connected to the leads by channels