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Alkoxide derived SrBi2Ta2O9phase pure powder and thin films

✍ Scribed by D. Ravichandran; K. Yamakawa; A. S. Bhalla; R. Roy

Publisher
Springer
Year
1997
Tongue
English
Weight
764 KB
Volume
9
Category
Article
ISSN
0928-0707

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Role of interfacial diffusion in SrBi2Ta
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SrBi Ta O (SBT) thin films were prepared on Pt / TiO / SiO / Si substrates by metalorganic decomposition 2 2 9 2 2 method. Impact of interfacial diffusion on structural and electrical properties of SBT film capacitors has been investigated by X-ray diffraction (XRD), scanning electron microscopy, Au