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Algorithm for statistical noise reduction in three-dimensional ion implant simulations

✍ Scribed by J.M. Hernández-Mangas; J. Arias; M. Jaraiz; L. Bailón; J. Barbolla


Book ID
114164558
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
178 KB
Volume
174
Category
Article
ISSN
0168-583X

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We present an algorithm for smoothing results of three-dimensional Monte Carlo ion implantation simulations and translating them from the grid used for the Monte Carlo simulation to an arbitrary unstructured three-dimensional grid. This algorithm is important for joining various simulations of semic