An algorithm for smoothing three-dimensi
✍
Clemens Heitzinger; Andreas Hössinger; Siegfried Selberherr
📂
Article
📅
2004
🏛
Elsevier Science
🌐
English
⚖ 323 KB
We present an algorithm for smoothing results of three-dimensional Monte Carlo ion implantation simulations and translating them from the grid used for the Monte Carlo simulation to an arbitrary unstructured three-dimensional grid. This algorithm is important for joining various simulations of semic