ALD Resist Formed by Vapor-Deposited Self-Assembled Monolayers

✍ Scribed by Hong, Junsic; Porter, David W.; Sreenivasan, Raghavasimhan; McIntyre, Paul C.; Bent, Stacey F.

• Book ID: 126414588
• Publisher: American Chemical Society
• Year: 2007
• Tongue: English
• Weight: 213 KB
• Volume: 23
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la0606401