ALD grown zinc oxide with controllable electrical properties

✍ Scribed by Guziewicz, E; Godlewski, M; Wachnicki, L; Krajewski, T A; Luka, G; Gieraltowska, S; Jakiela, R; Stonert, A; Lisowski, W; Krawczyk, M; Sobczak, J W; Jablonski, A

• Book ID: 120427671
• Publisher: Institute of Physics
• Year: 2012
• Tongue: English
• Weight: 766 KB
• Volume: 27
• Category: Article
• ISSN: 0268-1242
• DOI: 10.1088/0268-1242/27/7/074011