NANOMIXED TiO 2 -Ga 2 O 3 THIN FILMS GRO
NANOMIXED TiO 2 -Ga 2 O 3 THIN FILMS GROWN BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) METHOD
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LIU, G. X.; SHAN, F. K.; LEE, W. J.; LEE, G. H.; KIM, I. S.; SHIN, B. C.
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Article
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2006
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Taylor and Francis Group
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English
β 747 KB