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Al, Al/C and Al/Si implantations in 6H-SiC

✍ Scribed by Mulpuri V. Rao; Peter Griffiths; Jason Gardner; O. W. Holland; M. Ghezzo; J. Kretchmer; G. Kelner; J. A. Freitas


Book ID
112820062
Publisher
Springer US
Year
1996
Tongue
English
Weight
619 KB
Volume
25
Category
Article
ISSN
0361-5235

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