✦ LIBER ✦
Al+and B+implantations into 6H-SiC epilayers and application to pn junction diodes
✍ Scribed by T. Kimoto; O. Takemura; H. Matsunami; T. Nakata; M. Inoue
- Book ID
- 107457821
- Publisher
- Springer US
- Year
- 1998
- Tongue
- English
- Weight
- 261 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0361-5235
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