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A comparative study of C plus Al coimplantation and Al implantation in 4Hand 6H-SiC

✍ Scribed by Tone, K.; Zhao, J.H.

Book ID: 114537595
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 244 KB
Volume: 46
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.748886

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