✦ LIBER ✦

AIB induced chemical reactions at surfaces detected by SIMS

✍ Scribed by Gerald M. Lancaster; Fumihiro Honda; Yasuo Fukuda; J.Wayne Rabalais

Book ID: 103015998
Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 259 KB
Volume: 59
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(78)89111-8

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✦ Synopsis

Secondary ion mass spectrometry (SIMS) has been used to detect the reactions induced by active ion bombardment <AZB) of X$ OR surfaces of pyroiytic graphite and a (100) Si crystal The SIMS spectra e_xhibit ions of CN: HCN; H,CzN-(n = 2,3,4), HN, and SiN-, indiu*&s that reactions take place with the graphite and silicon as well as adsorbed hydrogen on the surfaces.

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