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Substrate disorder induced by a surface chemical reaction: the fluorine-silicon interaction

✍ Scribed by C.W. Lo; P.R. Varekamp; D.K. Shuh; T.D. Durbin; V. Chakarian; J.A. Yarmoff

Book ID: 104198903
Publisher: Elsevier Science
Year: 1993
Weight: 59 KB
Volume: 292
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(93)90856-e

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