New Jersey based Structured Materials Industries, Inc., now offers its induction-heated CVD tool designed for very high temperature and low pressure operation.
β¦ LIBER β¦
Agilent Technologies
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 114 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1369-7021
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