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Affect of annealing on uniform and non-uniform strains in a sputtered Mo film on Si. (USA)

Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 167 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)80814-1

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