✦ LIBER ✦
Study of lateral non-uniformity as a function of junction depth in ultra-shallow junctions and its effect on leakage behavior in as-deposited polycrystalline Si and amorphous Si diodes
✍ Scribed by Shubneesh Batra; Kyle Picone; Keun Hyung Park; Suryanarayana Bhattacharya; Sanjay Banerjee; Jack Lee; Monte Manning; Chuck Dennison
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 1020 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0038-1101
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