✦ LIBER ✦

AES and XPS analysis of the interaction of Ti with Si and SiO2 during RTA

✍ Scribed by H. Bender; W.D. Chen; J. Portillo; L. Van den Hove; W. Vandervorst

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 532 KB
Volume: 38
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90516-3

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The Ti/c-Si solid state reaction: II. Ad

The Ti/c-Si solid state reaction: II. Additional measurements by means of RBS, XPS and AES

✍ J.M.M. De Nijs; A. Van Silfhout 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 884 KB

An AES study of intrinsic and ion-induce

An AES study of intrinsic and ion-induced structure in the SiO2-Si system

✍ B. Lang; B. Sefsaf; G. Allan 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 897 KB

XPS study of the supported phase — SiO2

XPS study of the supported phase — SiO2 interaction in Mo/SiO2 and CoMo/SiO2 hydrodesulphurization catalysts in their oxidic precursor form

✍ P. Gajardo; D. Pirotte; C. Defosse; P. Grange; B. Delmon 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 1012 KB

Study of the electromigration behaviour

Study of the electromigration behaviour of Au-Ag thin films deposited on SiO2 substrate using AES, XPS and AFM techniques

✍ Cao, Lili; Shi, Fangxiao; Song, Weijie; Zhu, Yongfa 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 409 KB 👁 2 views

The purpose of this work was to study surface diffusion of atoms in Au-Ag films deposited on SiO 2 substrate under the action of a d.c. field, focusing on the effect of chemical reaction at the Au-Ag/SiO 2 interface on the electromigration behaviour. Atomic force microscopy measurement depicted the

Interaction between point defects, exten

Interaction between point defects, extended defects and impurities in the Si–SiO2 system during the process of its formation

✍ D. Kropman; T. Kärner; U. Abru; Ü. Ugaste; E. Mellikov; M. Kauk 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 174 KB

AES and factor analysis study of the int

AES and factor analysis study of the interaction of oxygen with tantalum and tantalum nitride thin films

✍ A Arranz; C Palacio 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 284 KB