AES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices

✍ Scribed by S. Baunack; S. Menzel; M. Pekarčíková; H. Schmidt; M. Albert; K. Wetzig

• Book ID: 105888056
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 316 KB
• Volume: 375
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s00216-002-1741-9