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Investigation of metallic interdiffusion in AlxGa1−xN/GaN/sapphire heterostructures used for microelectronic devices by SEM/EDX and SIMS depth profiling

✍ Scribed by H. Téllez; J. M. Vadillo; J. J. Laserna


Book ID
105893024
Publisher
Springer
Year
2010
Tongue
English
Weight
479 KB
Volume
397
Category
Article
ISSN
1618-2650

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