## Abstract Metalorganic vapor phase epitaxy of InN layers on sapphire was studied inβsitu by spectroscopic ellipsometry (SE), exβsitu atomic force microscopy and optical microscopy. Surface morphology has been largely improved by using nitrogen instead of hydrogen as carrier gas during sapphire ni
Aerosol particles from bubblers in metalorganic vapor phase epitaxy
β Scribed by Dr. K. Deppert; Dr. A. Wiedensohler
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 233 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0232-1300
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