Adverse chemical effects on the plasma-deposited amorphous silicon carbide passivation layer of thermal ink-jet thin-film heaters

✍ Scribed by Gendler, P. L.; Chang, L. S.

• Book ID: 126297495
• Publisher: American Chemical Society
• Year: 1991
• Tongue: English
• Weight: 813 KB
• Volume: 3
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm00016a015