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Advanced surface polishing using gas cluster ion beams

✍ Scribed by Z. Insepov; A. Hassanein; J. Norem; D.R. Swenson

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 507 KB
Volume: 261
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.04.134

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