A comprehensive guide to 3D MEMS packaging methods and solutions Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and packaging. This authoritative guide present
Advanced MEMS packaging
โ Scribed by John H. Lau ... [et al.]
- Publisher
- McGraw-Hill
- Year
- 2010
- Tongue
- English
- Leaves
- 577
- Edition
- English
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Synopsis
Introduction to MEMS --
Advanced MEMS packaging --
Enabling technologies for advanced MEMS packaging --
Advanced MEMS wafer-level packaging --
Optical MEMS packaging : communications --
Optical MEMS packaging : bubble switch --
Optical MEMS : microbolometer packaging --
Bio-MEMS packaging --
Biosensor packaging --
Accelerometer packaging --
Radiofrequency MEMS switches --
RF MEMS tunable capacitors and tubable band-pass filters --
Advanced packaging of RF MEMS devices
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