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๐Ÿ“

Advanced MEMS packaging

โœ Scribed by John H. Lau ... [et al.]


Publisher
McGraw-Hill
Year
2010
Tongue
English
Leaves
577
Edition
English
Category
Library

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โœฆ Synopsis


Introduction to MEMS --

Advanced MEMS packaging --

Enabling technologies for advanced MEMS packaging --

Advanced MEMS wafer-level packaging --

Optical MEMS packaging : communications --

Optical MEMS packaging : bubble switch --

Optical MEMS : microbolometer packaging --

Bio-MEMS packaging --

Biosensor packaging --

Accelerometer packaging --

Radiofrequency MEMS switches --

RF MEMS tunable capacitors and tubable band-pass filters --

Advanced packaging of RF MEMS devices


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