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Advanced colloidal lithography for sub-100 nm lift-off structures

✍ Scribed by Nico Homonnay; Nadine Geyer; Bodo Fuhrmann; Hartmut S. Leipner

Book ID: 113940802
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 524 KB
Volume: 86
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2011.04.009

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