✦ LIBER ✦
Evaluation of advanced epoxy novolac resist, EPR, for sub 100nm synchrotron x-ray proximity lithography
✍ Scribed by Yongduck Seo; Kyoungho Lee; Moonsuk Yi; Eunsung Seo; Bo Kyung Choi; Ohyun Kim; Ioannis Raptis; Panayiotis Argitis; Michael Hatzakis
- Book ID
- 104306546
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 803 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0167-9317
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