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Adhesion and fracture of tantalum nitride films

โœ Scribed by N.R. Mody; R.Q. Hwang; S. Venka-taraman; J.E. Angelo; D.P. Norwood; W.W. Gerberich


Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
599 KB
Volume
46
Category
Article
ISSN
1359-6454

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