𝔖 Bobbio Scriptorium

✦ LIBER ✦

The production of tantalum nitride film resistors using a continuous sputtering machine

✍ Scribed by Samir Abdin; Christian Val

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 309 KB
Volume: 57
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90172-x

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