✦ LIBER ✦
1780. A study of the effects of sputtering parameters on continuously deposited tantalum nitride films: L H George and W K Woo, Western Electric Co, Princeton, NJ, 1965, 19 pages
- Publisher
- Elsevier Science
- Year
- 1966
- Tongue
- English
- Weight
- 132 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0042-207X
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