Highly transparent conductive indium oxide (In203) thin films were prepared by DC magnetron sputtering using a pure indium oxide target in an argon atmosphere. A linear programming method for the production design of these thin films using a sputtering process was proposed. Sputtering model calculat
β¦ LIBER β¦
Activated reactive evaporation of a transparent conductive coating for the IR region
β Scribed by I. Lubezky; O. Marcovitch; Z. Klein; H. Zipin
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 493 KB
- Volume
- 148
- Category
- Article
- ISSN
- 0040-6090
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