✦ LIBER ✦

The parameters of a discharge in an AT-1 biased activated reactive evaporation system for TiN deposition

✍ Scribed by J. Markowski; A. Prajzner; J. Zdanowski

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 255 KB
Volume: 139
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(91)90591-a

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✦ Synopsis

The AT-1 system designed for deposition of hard coating, decorative or anticorrosive TiN layers with the biased activated reactive evaporation (BARE) method is described. The current-voltage characteristics of a plasma-activating electrode at various nitrogen pressures, electron beam currents (of the electron beam evaporator) as well as electrode geometries and positions are presented. The results of plasma measurements obtained by the glow discharge optical spectroscopy method are discussed.