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Accurate parameter extraction for the simulation of direct structuring by ion beams

โœ Scribed by S. Beuer; M. Rommel; Ch. Lehrer; E. Platzgummer; S. Kvasnica; A.J. Bauer; H. Ryssel

Book ID
108207701
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
671 KB
Volume
84
Category
Article
ISSN
0167-9317

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