Monte Carlo simulation for the sputtering yield of Si3N4thin film milled by focused ion beams

✍ Scribed by Yong-wen Tan; Yu-min Song; Peng Zhou; Cheng-yu Wang; Hai Yang

• Book ID: 107509490
• Publisher: Tianjin University of Technology
• Year: 2008
• Tongue: English
• Weight: 216 KB
• Volume: 4
• Category: Article
• ISSN: 1673-1905
• DOI: 10.1007/s11801-008-7144-1