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Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation

✍ Scribed by Tetsuo Sakka; Satoshi Akiba; Akira Kuroyanagi; Kokichi Hotta; Yukio H. Ogata; Mahito Mabuchi

Book ID: 108489209
Publisher: Elsevier Science
Year: 1998
Weight: 959 KB
Volume: 1
Category: Article
ISSN: 1288-3255
DOI: 10.1016/s1288-3255(99)80003-3

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