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Dopant and fluence effects on the ablation of silicon surfaces under pulsed CO2 laser irradiation

✍ Scribed by Tetsuo Sakka; Kokichi Hotta; Satoshi Akiba; Akira Kuroyanagi; Yukio H. Ogata; Mahito Mabuchi


Book ID
108418625
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
111 KB
Volume
127-129
Category
Article
ISSN
0169-4332

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